The authors gratefully acknowledge the expertise of Kevin Reeves (UCL, Archaeology) in scanning electron microscopy, Dr Andreas Kafizas and Dr Charlie Dunnill for guidance, and also thank University College London and EPSRC for funding. This article is part of a special section on the CVD of TiO2 and Doped TiO2 Films.
Production of Predominantly Anatase Thin Films on Various Grades of Steel and Other Metallic Substrates From TiCl4 and Ethyl Acetate by Atmospheric Pressure CVD†
Article first published online: 8 MAY 2012
Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Volume 18, Issue 4-6, pages 133–139, June 2012
How to Cite
Cross, A. J., Dunnill, C. W. and Parkin, I. P. (2012), Production of Predominantly Anatase Thin Films on Various Grades of Steel and Other Metallic Substrates From TiCl4 and Ethyl Acetate by Atmospheric Pressure CVD. Chem. Vap. Deposition, 18: 133–139. doi: 10.1002/cvde.201106964
- Issue published online: 6 JUN 2012
- Article first published online: 8 MAY 2012
- Manuscript Revised: 1 FEB 2012
- Manuscript Received: 6 NOV 2011
- Titanium dioxide
TiO2 thin films are deposited by atmospheric pressure (AP)CVD of TiCl4 and ethyl acetate on various substrates heated to 500 °C. The substrates investigated are four different grades of stainless steel (304, 304L, 316, and 316L), titanium metal, gold-coated titanium metal, and gold-coated stainless steel (316 grade). The TiO2 films are analyzed by Raman spectroscopy (RS) to determine the percentage of anatase present. Predominantly anatase films are produced on all the substrates, demonstrating the versatility of this method. Scanning electron microscopy (SEM) images reveal a marked difference in particle size between regions of high anatase content and lower anatase content, indicative of a difference in growth rate between anatase and rutile particles. Selected samples are shown to be photocatalytically active by degradation of resazurin dye by UV light. The rate of degradation is significantly faster than on the self-cleaning Saint Gobain Bioclean™.