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Keywords:

  • AACVD;
  • Coagulation;
  • Droplet;
  • Film thickness;
  • H2O Content

Abstract

Using binary mixtures {x water + (1-x) carbinol} and {x water + (1-x) ethanol} as solvents for the precursor solutions, Al-doped ZnO films are synthesized by cold-wall, aerosol-assisted (AA)CVD. The behavior of aerosol droplets influenced by H2O content in the precursor solution is discussed. It is found that as H2O content increases, the coagulation of the droplets is promoted by an increase in both the surface tension of the precursor solution and initial droplet mass. The coagulation reduces the amount of usable reactants that deposit on the substrate. As a result, the film thickness decreases with the increase in surface tension of the precursor solution and initial droplet mass. Transmittances in the visible range are also reduced by those micrometer-sized grains that precipitate from large coagulate droplets. Film cannot be synthesized once the surface tension of the precursor solution exceeds 25.00 × 10−3 N · m−1 and the initial droplet mass exceeds 4.474 × 10−15 kg in both systems {x water + (1-x) carbinol} and {x water + (1-x) ethanol}.