This work was supported by National Natural Science Foundation of China (Grant No 10835004, 51077009) and the Fundamental Research Funds for the Central Universities.
Uniformity, Structure, and Photocatalytic Activity of TiO2 Films Deposited by Atmospheric-Pressure Linear Cold Plasma†
Article first published online: 19 NOV 2012
Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Volume 18, Issue 10-12, pages 309–314, December 2012
How to Cite
Di, L.-B., Shi, C., Li, X.-S., Liu, J.-L. and Zhu, A.-M. (2012), Uniformity, Structure, and Photocatalytic Activity of TiO2 Films Deposited by Atmospheric-Pressure Linear Cold Plasma. Chem. Vap. Deposition, 18: 309–314. doi: 10.1002/cvde.201207007
- Issue published online: 6 DEC 2012
- Article first published online: 19 NOV 2012
- Manuscript Revised: 31 AUG 2012
- Manuscript Received: 2 JUN 2012
- National Natural Science Foundation of China. Grant Numbers: 10835004, 51077009
- Fundamental Research Funds for the Central Universities.
- AP plasma CVD;
- Dielectric barrier discharge;
- TiO2 photocatalytic film
Atmospheric-pressure (AP) linear cold plasma CVD is employed to deposit TiO2 photocatalytic films uniformly on a moving substrate. The in-plane and in-depth uniformities of the as-deposited TiO2 films are investigated by scanning electron microscopy (SEM) and UV-vis spectroscopy. The chemical binding states and compositions of the as-deposited TiO2 films are characterized by X-ray photoelectron spectroscopy (XPS). Raman, X-ray diffraction (XRD), and Fourier transform infrared (FTIR) spectra prove the structures of the as-deposited and calcined TiO2 films are mainly hydro-oxygenated amorphous (a-TiOx:OH), and exclusively anatase, respectively. The photocatalytic activity of the as-deposited and calcined TiO2 films is evaluated in a continuous flow reactor for HCHO removal with simulated air. The activity of the as-deposited TiO2 films increases with film thickness, leveling off at about 780 nm. The activity of the as-deposited TiO2 film is lower than that of the calcined one.