Atmospheric-pressure (AP) linear cold plasma CVD is employed to deposit TiO2 photocatalytic films uniformly on a moving substrate. The in-plane and in-depth uniformities of the as-deposited TiO2 films are investigated by scanning electron microscopy (SEM) and UV-vis spectroscopy. The chemical binding states and compositions of the as-deposited TiO2 films are characterized by X-ray photoelectron spectroscopy (XPS). Raman, X-ray diffraction (XRD), and Fourier transform infrared (FTIR) spectra prove the structures of the as-deposited and calcined TiO2 films are mainly hydro-oxygenated amorphous (a-TiOx:OH), and exclusively anatase, respectively. The photocatalytic activity of the as-deposited and calcined TiO2 films is evaluated in a continuous flow reactor for HCHO removal with simulated air. The activity of the as-deposited TiO2 films increases with film thickness, leveling off at about 780 nm. The activity of the as-deposited TiO2 film is lower than that of the calcined one.