Preparation and Formation Mechanism of Highly Dispersed Manganese Silicide on Silica by MOCVD of Mn(CO)5SiCl3

Authors

  • Jingchao Guan,

    1. Laboratory of Advanced Materials and Catalytic Engineering, School of Chemical Engineering, Dalian University of Technology Dalian 116024 (China)
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  • Jianhui Jin,

    1. Laboratory of Advanced Materials and Catalytic Engineering, School of Chemical Engineering, Dalian University of Technology Dalian 116024 (China)
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  • Xiao Chen,

    1. Laboratory of Advanced Materials and Catalytic Engineering, School of Chemical Engineering, Dalian University of Technology Dalian 116024 (China)
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  • Bingsen Zhang,

    1. Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences 72 Wenhua Road, Shenyang 110016 (China)
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  • Dangsheng Su,

    1. Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences 72 Wenhua Road, Shenyang 110016 (China)
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  • Changhai Liang

    Corresponding author
    1. Laboratory of Advanced Materials and Catalytic Engineering, School of Chemical Engineering, Dalian University of Technology Dalian 116024 (China)
    • Laboratory of Advanced Materials and Catalytic Engineering, School of Chemical Engineering, Dalian University of Technology Dalian 116024 (China)
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  • The authors gratefully acknowledge the financial support provided by the National Natural Science Foundation of China (21073023 and 20906008) and the Fundamental Research Funds for the Central Universities (DUT12YQ03).

Abstract

MnSi nanoparticles on silica are prepared by metal-organic (MO)CVD of Mn(CO)5SiCl3 as a single-source precursor. Mn(CO)5SiCl3 is synthesized from Mn2(CO)10 and SiHCl3 using standard Schlenk techniques, and confirmed by Fourier transform infrared (FTIR), single-crystal X-ray diffraction (XRD), and 13C and 29Si nuclear magnetic resonance (NMR). Powder XRD patterns, high resolution transmission electron microscopy (HRTEM), elemental maps, and energy dispersive X-ray (EDX) spectroscopy show that MnSi particles, with a size of about 5–6 nm, are uniformly dispersed on the silica support. The formation mechanism of MnSi nanoparticles on silica is investigated by in-situ FTIR spectroscopy. The results demonstrate the formation details of MnSi nanoparticles from Mn(CO)5SiCl3 through the elimination of carbonyl groups and dissociation of Si[BOND]Cl bonds with the promotion of H2.

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