Financial support by the German Federal Ministry for Education and Research (Grant No. FKZ 13N11777) and the Deutsche Forschungsgemeinschaft (DFG) (Grant No. RI1551/4-1) is gratefully acknowledged.
Atmospheric Pressure Plasma ALD of Titanium Oxide†
Version of Record online: 14 MAY 2013
Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Special Issue: Functional Materials by Atomic Layer Deposition
Volume 19, Issue 4-6, pages 167–173, June 2013
How to Cite
Theirich, D., Müller, R., Zilberberg, K., Trost, S., Behrendt, A. and Riedl, T. (2013), Atmospheric Pressure Plasma ALD of Titanium Oxide. Chem. Vap. Deposition, 19: 167–173. doi: 10.1002/cvde.201207039
- Issue online: 17 JUN 2013
- Version of Record online: 14 MAY 2013
- Manuscript Revised: 18 MAR 2013
- Manuscript Received: 20 NOV 2012
- German Federal Ministry for Education and Research. Grant Number: FKZ 13N11777
- Deutsche Forschungsgemeinschaft (DFG). Grant Number: RI1551/4-1
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