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Organic-Inorganic Hybrid Nano-laminates Fabricated by Ozone-assisted Molecular-atomic Layer Deposition

Authors

  • Jie Huang,

    1. Department of Material Science and Engineering, The University of Texas at Dallas, Richardson, Texas 75080, USA
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  • Mingun Lee,

    1. Department of Material Science and Engineering, The University of Texas at Dallas, Richardson, Texas 75080, USA
    2. Dongjin Semichem Co. Ltd. 625-3, Yodang-ri, Yangam-myun, Hwasung-si, Kyungki-do, 445-930, Korea
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  • Antonio Lucero,

    1. Department of Material Science and Engineering, The University of Texas at Dallas, Richardson, Texas 75080, USA
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  • Jiyoung Kim

    Corresponding author
    1. Department of Material Science and Engineering, The University of Texas at Dallas, Richardson, Texas 75080, USA
    2. School of Advanced Materials Engineering, Kookmin University, Seoul, 136-702, Korea
    • Department of Material Science and Engineering, The University of Texas at Dallas, Richardson, Texas 75080, USA
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  • This research was supported by the research program 2013 Kookmin University in Korea.

Abstract

In this study, we investigate 7-octenytrichlorosilane (7-OTS) multilayers and relevant organic-inorganic hybrid nano-laminates fabricated using ozone (O3) based molecular-atomic layer deposition (MALD). Highly concentrated O3 gas introduced into the MALD chamber converts alkene ([BOND]C[DOUBLE BOND]C) terminal groups of 7-OTS molecules into carboxylic ([BOND]COOH) groups. Trimethyl-aluminum (TMA) is applied to form a linker to construct multilayers of the OTS molecules. Aluminum oxide (Al2O3) and zinc oxide (ZnO) are embedded between the organic layers to form an organic-inorganic hybrid nano-laminate structure. Fourier transform infrared spectroscopy (FTIR), water contact angle measurement, ellipsometry, and transmission electron microscopy (TEM) are used to elucidate the growth mechanism.

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