The authors gratefully acknowledge the assistance of Mangesh Champhekar (N.C. State) for guidance in the nano-indentation characterization performed in this work. The authors also acknowledge Stephen J. Bull (Univ. of Newcastle) for guidance on the model for the contact modulus. This work was performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science. Sandia National Laboratories is a multi-program laboratory managed and operated by Sandia Corporation, a wholly owned subsidiary of Lockheed Martin Corporation, for the U.S. Department of Energy's National Nuclear Security Administration under contract DE-AC04-94AL85000. This work was supported by Sandia Nationl Laboratories (Department of Energy) #2011-1953. This work was supported in part by the National Science Foundation Project no. CMMI-1000382 (J.S.J.)
Influence of Subsurface Hybrid Material Growth on the Mechanical Properties of Atomic Layer Deposited Thin Films on Polymers†
Version of Record online: 16 MAY 2013
Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Special Issue: Functional Materials by Atomic Layer Deposition
Volume 19, Issue 4-6, pages 134–141, June 2013
How to Cite
Sun, Y., Padbury, R. P., Akyildiz, H. I., Goertz, M. P., Palmer, J. A. and Jur, J. S. (2013), Influence of Subsurface Hybrid Material Growth on the Mechanical Properties of Atomic Layer Deposited Thin Films on Polymers. Chem. Vap. Deposition, 19: 134–141. doi: 10.1002/cvde.201207042
- Issue online: 17 JUN 2013
- Version of Record online: 16 MAY 2013
- Manuscript Revised: 20 FEB 2013
- Manuscript Received: 2 DEC 2012
Options for accessing this content:
- If you are a society or association member and require assistance with obtaining online access instructions please contact our Journal Customer Services team.
- If your institution does not currently subscribe to this content, please recommend the title to your librarian.
- Login via other institutional login options http://onlinelibrary.wiley.com/login-options.
- You can purchase online access to this Article for a 24-hour period (price varies by title)
- If you already have a Wiley Online Library or Wiley InterScience user account: login above and proceed to purchase the article.
- New Users: Please register, then proceed to purchase the article.
Login via OpenAthens
Search for your institution's name below to login via Shibboleth.
Registered Users please login:
- Access your saved publications, articles and searches
- Manage your email alerts, orders and subscriptions
- Change your contact information, including your password
Please register to:
- Save publications, articles and searches
- Get email alerts
- Get all the benefits mentioned below!