The authors gratefully acknowledge the assistance of Mangesh Champhekar (N.C. State) for guidance in the nano-indentation characterization performed in this work. The authors also acknowledge Stephen J. Bull (Univ. of Newcastle) for guidance on the model for the contact modulus. This work was performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science. Sandia National Laboratories is a multi-program laboratory managed and operated by Sandia Corporation, a wholly owned subsidiary of Lockheed Martin Corporation, for the U.S. Department of Energy's National Nuclear Security Administration under contract DE-AC04-94AL85000. This work was supported by Sandia Nationl Laboratories (Department of Energy) #2011-1953. This work was supported in part by the National Science Foundation Project no. CMMI-1000382 (J.S.J.)
Influence of Subsurface Hybrid Material Growth on the Mechanical Properties of Atomic Layer Deposited Thin Films on Polymers†
Version of Record online: 16 MAY 2013
Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Special Issue: Functional Materials by Atomic Layer Deposition
Volume 19, Issue 4-6, pages 134–141, June 2013
How to Cite
Sun, Y., Padbury, R. P., Akyildiz, H. I., Goertz, M. P., Palmer, J. A. and Jur, J. S. (2013), Influence of Subsurface Hybrid Material Growth on the Mechanical Properties of Atomic Layer Deposited Thin Films on Polymers. Chem. Vap. Deposition, 19: 134–141. doi: 10.1002/cvde.201207042
- Issue online: 17 JUN 2013
- Version of Record online: 16 MAY 2013
- Manuscript Revised: 20 FEB 2013
- Manuscript Received: 2 DEC 2012
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