The authors wish to acknowledge the Polish Committee for Scientific Research for the financial support grant no. N N204 546539.
Deposition of Thin Copper Layers using Copper(II) Carboxylate Complexes with tert-Butylamine as New CVD Precursors†
Article first published online: 7 AUG 2013
© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Volume 19, Issue 7-8-9, pages 251–259, September 2013
How to Cite
Piszczek, P., Szymańska, I. B., Talik, E. and Heimann, J. (2013), Deposition of Thin Copper Layers using Copper(II) Carboxylate Complexes with tert-Butylamine as New CVD Precursors. Chem. Vap. Deposition, 19: 251–259. doi: 10.1002/cvde.201207049
- Issue published online: 14 SEP 2013
- Article first published online: 7 AUG 2013
- Manuscript Revised: 11 MAR 2013
- Manuscript Received: 14 DEC 2012
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