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Potential of Hexyl Acrylate Monomer as an Initiator in Photo-initiated CVD


  • The authors would like to thank UConn undergraduates Brian Ciezynski, Chris Pacileo, and Leia Dwyer for the data from the iCVD portion of this work.


The potential of hexyl acrylate as an initiator in photo-initiated (pi) CVD is explored by demonstrating its auto-polymerization under ultraviolet (UV) radiation of wavelength 254 nm. Deposition of poly(hexyl acrylate) films on silicon substrates proceeds at high rates, approaching 1.7 µm min−1, at a stage temperature of 12.1°C, and the process is observed to be adsorption controlled.