Get access

New Dimethyl(norbornadienyl)platinum(II) Precursors for Platinum MOCVD

Authors

  • William Maudez,

    1. Please check titles of all authors▪LSPM, Université Paris 13, UPR CNRS 3407, Institut Galilée, Villetaneuse, (France)
    Search for more papers by this author
  • Christelle Roy,

    1. Please check titles of all authors▪LSPM, Université Paris 13, UPR CNRS 3407, Institut Galilée, Villetaneuse, (France)
    Search for more papers by this author
  • Phong Dinh Tran,

    1. Please check titles of all authors▪LSPM, Université Paris 13, UPR CNRS 3407, Institut Galilée, Villetaneuse, (France)
    Search for more papers by this author
  • Cyril Thurier,

    1. Please check titles of all authors▪LSPM, Université Paris 13, UPR CNRS 3407, Institut Galilée, Villetaneuse, (France)
    Search for more papers by this author
  • Farah Karmous,

    1. Please check titles of all authors▪LSPM, Université Paris 13, UPR CNRS 3407, Institut Galilée, Villetaneuse, (France)
    Search for more papers by this author
  • Pascal Doppelt

    Corresponding author
    1. Please check titles of all authors▪LSPM, Université Paris 13, UPR CNRS 3407, Institut Galilée, Villetaneuse, (France)
    • LSPM, Université Paris 13, UPR CNRS 3407, Institut Galilée, 99 avenue Jean-Baptiste Clément, 93430 Villetaneuse (France)

    Search for more papers by this author

  • The authors gratefully acknowledge the financial support from the ANR (French National Research Agency) in the framework of the INNOVAME and FACTEUR 10 projects (ANR-05-PANH-016 and ANR-09-HPAC-004). We thank Pascal Retailleau (ICSN), Benjamin Villeroy (ICMPE-CMTR), Nadia Bouchemal (CSPBAT), and Dominique Vrel (LSPM) for their contribution to our products analysis.

Abstract

The synthesis, characterization, and application as CVD precursors of several new dimethyl(norbornadienyl)platinum(II) compounds are reported. Initially, synthesis is performed in a two-step procedure from K2PtCl4 with (Rnbd)PtI2 as an intermediate, but a convenient “one-pot” procedure is developed that allows the formation of platinum(II) precursors with good yield and purity. Novel platinum compounds are; (nbd)PtMe2 (1), (7-Me-nbd)PtMe2 (2), (7-Et-nbd)PtMe2 (3), (7-iPr-nbd)PtMe2 (4), and (2-Et-nbd)PtMe2 (5). Compounds 1 − 4 are solids while 5 is liquid at room temperature. Fine-tuning of the organic environment provides some control of the thermal stability and volatility. Liquid-delivery CVD is reported using 1 and 5 Pt precursor solutions. Excellent results are obtained in the presence of oxygen as a co-reactant. The as-deposited Pt films are analyzed in terms of morphology, crystalline structure, and composition.

Ancillary