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Catalyst-free Growth Mechanism and Structure of Graphene-like Nanosheets Formed by Hot-Filament CVD


  • This work was supported by the Beijing Nova Program (Z121103002512017), the Foundation for the Author of National Excellent Doctoral Dissertation of PR China(201214), Fundamental Research Funds for the Central Universities, and Program for New Century Excellent Talents in Fujian Province University (NCETFJ).


We report on a simple and effective method of synthesizing graphene-like nanosheets on silicon substrates pre-deposited with a carbon film or carbon nanodots in hot-filament(HF)CVD from a methane precursor. The results of field emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM), and micro-Raman spectroscopy (RS) indicate that the structure of graphene-like nanosheets is changed with the flow rate change of methane and the pretreatment of the substrate surface. The catalyst-free growth of graphene-like nanosheets is related to the diffusion and assembly of carbon atoms on the substrate surface and the separation of graphene-like nanosheets from the substrate surface.