Remote Microwave PECVD for Continuous, Wide-Area Coating Under Atmospheric Pressure (pages 497–509)
V. Hopfe, R. Spitzl, I. Dani, G. Maeder, L. Roch, D. Rogler, B. Leupolt and B. Schoeneich
Article first published online: 12 DEC 2005 | DOI: 10.1002/cvde.200406352
Microwave PECVD technology has been extended to atmospheric pressure operation. A cylinder type microwave cavity was scaled-up to different working diameters. The half-meter range already has been achieved and further scale-up potential could be demonstrated. Silica layers were deposited on stainless steel and glass. Deposition rates were in the range of 15 – 100 nm/s (static) and 0.3 – 2.0 nm m s–1 (dynamic). Layer properties were determined by spectroscopic-ellipsometry and FTIR reflectance spectroscopy, elastic recoil detection analysis, and nano-indentation. The optical properties and the network structure of the silica layers are close to bulk silica.