Synthesis and Mechanical Properties of Cubic Boron Nitride /Nanodiamond Composite Films (pages 33–38)
Y.-M. Chong, K.-L. Ma, K.-M. Leung, C.-Y. Chan, Q. Ye, I. Bello, W. Zhang and S.-T. Lee
Version of Record online: 19 JAN 2006 | DOI: 10.1002/cvde.200506422
Large-area cubic boron nitride/nanodiamond (cBN/ND) composite films have been deposited on silicon substrates using plasma-assisted chemical vapor deposition processes, and their mechanical properties have been studied systematically. The adhesion and mechanical properties of the composite films are shown to be strengthened by the layered structure. The cBN/ND composite layer is characterized by surface smoothness, high mechanical strength, high chemical resistance, and outstanding thermal properties, beneficial for fine tool applications, and in the construction of surface acoustic wave (SAW) devices.