Controlling the Size and Density of Silicon Nanostructures by Incorporation of Nitrogen (pages 353–357)
Ragnar Kiebach, Zhenrui Yu, Mariano Aceves-Mijares, Jinhui Du, Dongcai Bian, Rosa López-Estopier, Jesús Carrillo-Lopez, Gabriel Juárez-Diaz and Javier Martinez Juarez
Article first published online: 16 DEC 2008 | DOI: 10.1002/cvde.200806711
Full Paper: Si nanocrystals and nanoislands were prepared by thermal annealing of silicon rich oxide which was deposited using low pressure chemical vapor deposition. The influence of the incorporation of nitrogen on the density, crystallinity and size of the Si nanostructures was investigated (see figure).