PECVD Siloxane and Fluorine-Based Copolymer Thin Films (pages 286–291)
Hao Jiang, Kurt Eyink, John T. Grant, Jesse Enlow, Scott Tullis and Timothy J. Bunning
Version of Record online: 6 OCT 2008 | DOI: 10.1002/cvde.200806684
Full Paper: HMDSO and OFCB plasma copolymerized films have been fabricated. A nonlinear relationship between the refractive index and extinction coefficient with comonomer feed ratio was observed. Defluorination and formation of a carbon rich network produced a strong initial increase in both n and k. Once substantial amounts of SiC and SiO bonds were incorporated, the refractive index decreased slowly due to a lowering of the density.