Chemical Vapor Deposition

Cover image for Vol. 16 Issue 1‐3

March 2010

Volume 16, Issue 1-3

Pages 3–112

  1. Cover Picture

    1. Top of page
    2. Cover Picture
    3. Contents
    4. Editorial
    5. Communications
    6. Full Papers
    7. Index
  2. Contents

    1. Top of page
    2. Cover Picture
    3. Contents
    4. Editorial
    5. Communications
    6. Full Papers
    7. Index
    1. Contents: (Chem. Vap. Deposition 1–2–3/2010) (pages 3–6)

      Article first published online: 22 MAR 2010 | DOI: 10.1002/cvde.201090002

  3. Editorial

    1. Top of page
    2. Cover Picture
    3. Contents
    4. Editorial
    5. Communications
    6. Full Papers
    7. Index
  4. Communications

    1. Top of page
    2. Cover Picture
    3. Contents
    4. Editorial
    5. Communications
    6. Full Papers
    7. Index
    1. Bionic Superhydrophobic and Drag-Reduction Properties on ZnO-Nanostructured Functional Surfaces (pages 12–14)

      Ming Zhou, Jian Li, Cheng-Cheng Feng, Chun-Xia Wu, Run Yuan and Lan Cai

      Article first published online: 4 MAR 2010 | DOI: 10.1002/cvde.200904276

      Thumbnail image of graphical abstract

      This manuscript reports the drag reduction of the surface coated with Zinc Oxide nanostructures. The surface is prepared by chemical vapor deposition on a silicon substrate and characterized by scanning electron microscopy. Then the slip lengths of the surface in three liquids with different viscosities are measured using a rheometer system.

    2. Bio-integration Ceramics on 3D Specimens by Pulsed-Pressure Metal-Organic CVD (pages 15–18)

      Susan Krumdieck, Vilailuck Siriwongrungson, Ben Reyngoud and Anne Barnett

      Article first published online: 4 MAR 2010 | DOI: 10.1002/cvde.200904284

      A number of biocompatible rods were coated with calcium phosphate and TiO2 using PP-MOCVD with one end heated to 600 °C. Films of both materials coated the length of the 3-D rod shape. The Ca:P material had an interesting spherical morphology as observed by SEM, had a Ca:P ratio in the range for hydroxyapitite as measured by EDS, and exhibited no crystalline peaks in XRD analysis.

    3. Antimicrobial Activity in Thin Films of Pseudobrookite-Structured Titanium Oxynitride under UV Irradiation Observed for Escherichia coli (pages 19–22)

      Zoie A. Aiken, Geoffrey Hyett, Charles W. Dunnill, Mike Wilson, Jonathan Pratten and Ivan P. Parkin

      Article first published online: 4 MAR 2010 | DOI: 10.1002/cvde.200904285

      It has been possible to observe a 99.98% reduction in the viable count of colonies of E. coli on a film of titanium oxynitride when exposed to 365 nm light. This film of the recently discovered Ti2.85O4N, isostructural to pseudobrookite, was grown on a glass substrate using atmospheric pressure chemical vapour deposition (APCVD).

  5. Full Papers

    1. Top of page
    2. Cover Picture
    3. Contents
    4. Editorial
    5. Communications
    6. Full Papers
    7. Index
    1. Grafting CVD of Poly(vinyl pyrrolidone) for Durable Scleral Lens Coatings (pages 23–28)

      Kyra L. Sedransk, Wyatt E. Tenhaeff and Karen K. Gleason

      Article first published online: 4 MAR 2010 | DOI: 10.1002/cvde.200906760

      Grafting chemical vapor deposition from the monomer 1-vinyl-2-pyrrolidone and the Type II initiator benzophenone under 254 nm UV irradiation yielded durable, hydrophilic coatings on poly(methacrylic acid) derivative as desired for scleral lenses. Improved hydrophilicity was observed throughout the entire 120 saline soak testing period with optimal advancing and receding contact angles (with water) of 39.5° ± 2.6° and 36.2 ± 1.6°, respectively.

    2. a-SiOx Coatings Grown on Dental Materials by PECVD: Compositional Analysis and Preliminary Investigation of Biocompatibility Improvements (pages 29–34)

      Pietro Mandracci, Paola Ceruti, Carlo Ricciardi, Federico Mussano and Stefano Carossa

      Article first published online: 4 MAR 2010 | DOI: 10.1002/cvde.200906761

      Protective a-SiOx coatings were grown by PECVD at room temperature on ceramic and resin substrates used in restorative dentistry. An EDX analysis of the materials surfaces was carried out to investigate for the presence of potentially poisonous elements. The interaction of substrates and coatings with cells was also investigated, showing some interesting potential of a-SiOx coatings for the reduction of cytotoxicity in dental materials.

    3. CVD Elaboration of Nanostructured TiO2-Ag Thin Films with Efficient Antibacterial Properties (pages 35–41)

      Jitti Mungkalasiri, Laurent Bedel, Fabrice Emieux, Jeanne Doré, François N. R. Renaud, Christos Sarantopoulos and Francis Maury

      Article first published online: 4 MAR 2010 | DOI: 10.1002/cvde.200906764

      TiO2-Ag nanocomposite coatings were deposited by a one step DLI-MOCVD process on various substrates. The silver nanoparticles are uniformly embedded in the oxide matrix through the layer thickness. The films are bactericidal in dark for Ag content lower than 1 at.-%. A photocatalytic activity was found under UV light but it decreases by increasing the Ag content. This dual functionality is promising for long term anti-bacterial surfaces.

    4. Direct and Protein-Mediated Cell Attachment on Differently Terminated Nanocrystalline Diamond (pages 42–49)

      Frederik Klauser, Martin Hermann, Doris Steinmüller-Nethl, Oliver Eiter, Alberto Pasquarelli, Erminald Bertel, Thomas Seppi, Peter Lukas and Thomas Lechleitner

      Article first published online: 22 MAR 2010 | DOI: 10.1002/cvde.200906828

      The presented study investigates the influence of fetal bovine serum (FBS) on cell attachment on hydrophobic and hydrophilic surfaces. FBS is a widely used supplement for cell growth media. Differently terminated nanocrystalline diamond (NCD) surfaces served as cell growth supports with identical surface roughness, but varying wettability. The presence of FBS in the growth medium resulted in altered cell attachment as compared to cells cultured in FBS-free medium.

    5. Sulfur- and Nitrogen-Doped Titania Biomaterials via APCVD (pages 50–54)

      Charles W. Dunnill, Zoie A. Aiken, Jonathan Pratten, Michael Wilson and Ivan P. Parkin

      Article first published online: 4 MAR 2010 | DOI: 10.1002/cvde.200906836

      A comparison between two of the best performing photocatalysts in a series of nitrogen- and sulfur-doped titania visible light photocatalysts prepared by atmospheric pressure (AP)CVD is made against a sample of pure undoped titania. This study compares the ability of the samples to photo-oxidize stearic acid and kill Escherichia coli bacteria using white light sources commonly found in UK hospitals. It is shown that both nitrogen- and sulfur-doped photocatalysts are bioactive with extraordinarily similar properties though the nitrogen-doped samples are found to perform very slightly better than the sulfur-doped samples. These materials are suggested for use as anti-microbial surfaces in healthcare environments and as self-cleaning glass.

    6. Deposition of Bio-Integration Ceramic Hydroxyapatite by Pulsed-Pressure MOCVD Using a Single Liquid Precursor Solution (pages 55–63)

      Susan P. Krumdieck, Benjamin P. Reyngoud, Anne D. Barnett, Deborah J. Clearwater, Richard M. Hartshorn, Catherine M. Bishop, Benjamin P. Redwood and Ellen L. Palmer

      Article first published online: 22 MAR 2010 | DOI: 10.1002/cvde.200906839

      Hydroxyapatite films have been prepared by pulsed-pressure MOCVD by single source liquid precursor using calcium lactate and tri-methyl phosphate. The precursor mixture, deposition temperature and precursor concentration to produce calcium phosphate with the stoichiometry of hydroxyapatite were investigated. Fully amorphous hydroxyapatite was produced with very interesting topology with spherical morphology. The deposition formed a solid, adherent, conformal layer on the biomedical grade titanium alloy substrates with chaotic spherical and nebulous structures growing normal to the substrate. The number and profile of the spherical structures increased with temperature and precursor concentration.

    7. Comparison of Coupling Methods for Linking Between Reactor and Feature Scales (pages 65–71)

      Jonathan Jilesen and Fue-Sang Lien

      Article first published online: 4 MAR 2010 | DOI: 10.1002/cvde.200906800

      Comparison of two existing methods for coupling reactor scale (continuum) and feature scale (non-continuum) models for multi-scale modeling of chemical vapour deposition. The methods have different coupling interfaces with one using the wafer surface while the other uses a plane offset from the surface. Modifications to the offset method allow it to be applied to a modified line of sight feature scale model.

    8. The Growth of One-Dimensional Single-Crystalline AlN Nanostructures by HVPE and Their Field Emission Properties (pages 72–79)

      Yun-Ki Byeun, Rainer Telle, Se-Hyuk Jung, Sung-Churl Choi and Hak-In Hwang

      Article first published online: 4 MAR 2010 | DOI: 10.1002/cvde.200906801

      Halide vapor-phase epitaxy system to grow 1-dimensional single crystalline AlN nanostructures has been developed in this work. The needle shaped AlN nanorod array exhibit on excellent field emission property with a low turn-on field of 2.25 V/µm. This technique may provide great advances in optoelectronics and field emission nanodevices.

    9. Epitaxial Lateral Overgrowth of GaN on Si (111) Substrates Using High-Dose, N+ Ion Implantation (pages 80–84)

      Bumjoon Kim, Kwangtaek Lee, Samseok Jang, Junggeun Jhin, Seungjae Lee, Jonghyeob Baek, Youngmoon Yu, Jaesang Lee and Dongjin Byun

      Article first published online: 22 MAR 2010 | DOI: 10.1002/cvde.200906807

      A single-step-maskless ELOG GaN layer was grown on a Si (111) substrate using high-dose N+-ion implantation. The GaN layer on the N+-ion-implanted region was polycrystalline and acted as a mask for the ELO process. Complete coalescence was achieved with a flat surface. CL microscopy and TEM demonstrated the high optical and crystalline quality of the ELOG GaN layer.

    10. The Synthesis of Highly Loaded Cu/Al2O3 and Cu/ZnO/Al2O3 Catalysts by the Two-Step CVD of CuIIdiethylamino-2-propoxide in a Fluidized-Bed Reactor (pages 85–92)

      Michael Becker, Raoul Naumann d'Alnoncourt, Kevin Kähler, Jelena Sekulic, Roland A. Fischer and Martin Muhler

      Article first published online: 22 MAR 2010 | DOI: 10.1002/cvde.200906808

      Highly loaded copper catalysts supported on alumina were synthesized applying the cyclic two-step chemical vapor deposition of the precursor copper(II)diethylamino-2-propoxide in a fluidized-bed reactor. Copper/zinc oxide/alumina composites were synthesized by either the CVD of the precursor bis[bis(trimethylsilyl)amido]zinc on Cu/Al2O3, or by the CVD of the Cu precursor on Zn-pretreated alumina. The turn-over frequencies in methanol synthesis of these Cu/ZnO/Al2O3 catalysts were higher than that of a commercial ternary catalyst.

    11. Investigation of New 2,5-Dimethylpyrrolyl Titanium Alkylamide and Alkoxide Complexes as Precursors for the Liquid Injection MOCVD of TiO2 (pages 93–99)

      Kate Black, Anthony C. Jones, John Bacsa, Paul R. Chalker, Paul A. Marshall, Hywel O. Davies, Peter N. Heys, Paul O'Brien, Mohammad Afzaal, James Raftery and Gary W. Critchlow

      Article first published online: 22 MAR 2010 | DOI: 10.1002/cvde.200906818

      Thumbnail image of graphical abstract

      The new Ti-2,5-dimethylpyrrolyl complexes [(Me2C4H2N)Ti(NMe2)3] (see Fig. below) and [(Me2C4H2N)Ti(µ2-OiPr)(OiPr)2]2 have been synthesised and structurally characterised. They have been investigated as precursors for the deposition of TiO2 by liquid injection MOCVD over a wide range of substrate temperatures.

    12. Tunable Conformality of Polymer Coatings on High Aspect Ratio Features (pages 100–105)

      Gozde Ozaydin-Ince and Karen K. Gleason

      Article first published online: 4 MAR 2010 | DOI: 10.1002/cvde.200906821

      Conformal polymer thin-film coatings of high aspect ratio trenches can be achieved by tuning the process parameters of initiated CVD. Effects of deposition parameters on conformality are studied at various aspect ratios using a ballistic model. The results of these studies enabled the fabrication of template-based polymer nanotubes of high aspect ratios.

    13. A New Method for the Growth of Zinc Oxide Nanowires by MOCVD using Oxygen-Donor Adducts of Dimethylzinc (pages 106–111)

      Kate Black, Paul R. Chalker, Anthony C. Jones, Peter J. King, John L. Roberts and Peter N. Heys

      Article first published online: 4 MAR 2010 | DOI: 10.1002/cvde.200906831

      Thumbnail image of graphical abstract

      A new method has been developed for the growth of ZnO nanowires by MOCVD using the dimethylzinc adducts [Me2Zn(L)] (L = tetrahydrofuran, tetrahydropyran or furan). These adducts prevent pre-reaction with oxygen and ZnO films deposited at 500 oC showed nanowire morphology (see Fig. below) and intense near band-edge photoluminescence.

  6. Index

    1. Top of page
    2. Cover Picture
    3. Contents
    4. Editorial
    5. Communications
    6. Full Papers
    7. Index

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