MOCVD of ZnO Films from Bis(Ketoiminato)Zn(II) Precursors: Structure, Morphology and Optical Properties (pages 155–161)
Daniela Bekermann, Arne Ludwig, Teodor Toader, Chiara Maccato, Davide Barreca, Alberto Gasparotto, Claudia Bock, Andreas D. Wieck, Ulrich Kunze, Eugenio Tondello, Roland A. Fischer and Anjana Devi
Version of Record online: 26 MAY 2011 | DOI: 10.1002/cvde.201006898
Zinc oxide thin films have been successfully grown by MOCVD from two related bis(ketoiminato) zinc precursors. Depositions were performed on Si(100) and borosilicate glass substrates under N2+O2 atmospheres at temperatures between 400 and 700°C, yielding pure and stoichiometric ZnO thin films, with structure and morphology directly dependent on the growth conditions. The optical properties of the as-grown ZnO layers were investigated by UV-Vis spectroscopy and photoluminescence measurements.