Chemical Vapor Deposition

Cover image for Vol. 18 Issue 10‐12

December 2012

Volume 18, Issue 10-12

Pages 263–342

  1. Cover Picture

    1. Top of page
    2. Cover Picture
    3. Masthead
    4. Contents
    5. Full Papers
  2. Masthead

    1. Top of page
    2. Cover Picture
    3. Masthead
    4. Contents
    5. Full Papers
  3. Contents

    1. Top of page
    2. Cover Picture
    3. Masthead
    4. Contents
    5. Full Papers
  4. Full Papers

    1. Top of page
    2. Cover Picture
    3. Masthead
    4. Contents
    5. Full Papers
    1. The Growth Kinetics of Nickel Aluminide Coatings by the Bi-velocity Method (pages 267–273)

      Bartek Wierzba, Marek Danielewski, Katarzyna Tkacz-Śmiech and Jan Sieniawski

      Version of Record online: 19 NOV 2012 | DOI: 10.1002/cvde.201206999

      Thumbnail image of graphical abstract

      The problem of simultaneous growth and competition of intermediate phases is presented. The volume continuity equation is used to compute the material velocity in a reacting system in which reactions occur at several moving interfaces. The growth of multiphase layers is show. The CVD process and annealing in a non-oxidizing atmosphere are simulated. The kinetics and concentration profile of the reactive diffusion in an Al-Ni system are compared with experiments.

    2. Thermally Induced Release of Internal Liquid Phase Encapsulated in a Polymer Membrane Grown by Photoactivated DLICVD (pages 274–281)

      Claudiu Constantin Manole, Francis Maury and Ioana Demetrescu

      Version of Record online: 5 NOV 2012 | DOI: 10.1002/cvde.201206987

      Thumbnail image of graphical abstract

      Microscopic liquid monomer droplets are encapsulated in an ultrathin polymeric film grown by photo-DLICVD. When the temperature increases, the liquid expands. The monomer (i.e., the encapsulated liquid) expands faster, exerting a strain on the polymer (solid membrane). This strain (ετ) is proportional to the difference in temperature (ΔT). Beyond a threshold value, the strain leads to a rupture of the polymeric film and a release of the liquid internal phase.

    3. Control of ZnO Nanostructures via Vapor Transport (pages 282–288)

      Deena R. Modeshia, Charles W. Dunnill, Yuji Suzuki, Ahmed A. Al-Ghamdi, Elsayed H. El-Mossalamy, Abdullah Y. Obaid, Sulaiman N. Basahel, Abdulrahman O. Alyoubi and Ivan. P. Parkin

      Version of Record online: 9 NOV 2012 | DOI: 10.1002/cvde.201206998

      Thumbnail image of graphical abstract

      ZnO nanostructures are grown under a number of different conditions yielding a wide range of microstructures from “nano-stars”, “nano-caterpillars”, urchin-like structures to vertically aligned forests of hexagonal nanorods. For the nano-caterpillars, hexagonal crystals grow from the catalytic substrate allowing propagation of parent pillars, which subsequently form “daughter” rods propagating sideways from the faces.

    4. A Study on Sc2O3-Stabilized Zirconia Obtained by MOCVD as a Potential Electrolyte for Solid Oxide Fuel Cells (pages 289–294)

      Naida El Habra, Andrea Sartori, Marco Bolzan, Monica Favaro, Maurizio Casarin, Stefano Boldrini, Lioudmila Doubova and Gilberto Rossetto

      Version of Record online: 9 NOV 2012 | DOI: 10.1002/cvde.201207006

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      Full Paper: Dense, crack-free thin films (<5 µm) of a nanostructured scandia-zirconia system (Sc2O3:ZrO2), both partially and fully stabilized in the cubic-fluorite phase (c-ZrO2), are deposited onto porous substrates (Al2O3 and NiO/YSZ cermet) through conventional LP-MOCVD. The crystal structure, the morphology, and the composition of deposits are investigated. To evaluate the ionic transport properties, the in-plane conductivity of the thin films is measured.

    5. Growth of Indium Oxide and Zinc-Doped Indium Oxide Nanostructures (pages 295–301)

      Ashish Karn, Mukesh Kumar, Vidyanand N. Singh, Bodh R. Mehta, Sivanantham Aravindan and Jitendra P. Singh

      Version of Record online: 9 NOV 2012 | DOI: 10.1002/cvde.201207001

      The growth of zinc-doped indium oxide nanostructures from mesocontainers to nanowires by the use of thermal vapor transport of an In2O3 + ZnO mixed precursor under oxidizing and reducing environments is reported. Surprisingly, a change of the growth environment from reducing to oxidizing (or inert) results in the growth of In2O3-ZnO nanowires (or nanorods). This study provides insight into the growth of In2O3-ZnO ternary oxide nanostructures.

    6. Boron-doped Homoepitaxial Diamond CVD from Microwave Plasma-Activated Ethanol/Trimethyl Borate/Hydrogen Mixtures (pages 302–308)

      Maxim E. Belousov, Yuri A. Mankelevich, Pavel V. Minakov, Alexander T. Rakhimov, Nikolay V. Suetin, Roman A. Khmelnitskiy, Alexei A. Tal and Alexander V. Khomich

      Version of Record online: 9 NOV 2012 | DOI: 10.1002/cvde.201206993

      Thumbnail image of graphical abstract

      Boron-doped homoepitaxial diamond films are deposited from ethanol/trimethyl borate/hydrogen mixtures activated by a microwave discharge plasma. Measurements of film surface roughness show their excellent smoothness, which usually corresponds to a low concentration of growth defects. A uniform distribution of boron atoms located predominantly in substitution positions and low concentration of the nitrogen compensating impurity is achieved.

    7. Uniformity, Structure, and Photocatalytic Activity of TiO2 Films Deposited by Atmospheric-Pressure Linear Cold Plasma (pages 309–314)

      Lan-Bo Di, Chuan Shi, Xiao-Song Li, Jing-Lin Liu and Ai-Min Zhu

      Version of Record online: 19 NOV 2012 | DOI: 10.1002/cvde.201207007

      Thumbnail image of graphical abstract

      Atmospheric-pressure, linear, cold plasma is employed to deposit TiO2 photocatalytic films uniformly on a moving substrate. Raman, XRD, and FTIR spectra prove that the structures of the as-deposited and calcined TiO2 films are mainly hydro-oxygenated amorphous (a-TiOx:OH) and anatase, respectively. All the as-deposited TiO2 films exhibit clear photocatalytic activity in complete oxidation of HCHO to CO2.

    8. Oxide Coating of Alumina Nanoporous Structure Using ALD to Produce Highly Porous Spinel (pages 315–325)

      Erwan Rauwel, Ola Nilsen, Protima Rauwel, John Charles Walmsley, Heidi Berge Frogner, Erling Rytter and Helmer Fjellvåg

      Version of Record online: 9 NOV 2012 | DOI: 10.1002/cvde.201207005

      The deposition of ZnO and CoO thin films using ALD on γ-alumina nanoporous particles and membrane discs with the objective of converting their surfaces into mechanically more robust, nanoporous, alumina spinel phases is described. The porosity is maintained by utilizing subsequent reactions between the coated layer and γ-alumina, based on the Kirkendall mechanism. This represents a new way to produce highly porous spinel.

    9. A Comparative Study of Various Supported Catalysts on the Growth of Aligned Carbon Nanotube Forests on Aluminum Foils (pages 326–335)

      Raghunandan Ummethala, Vyacheslav O. Khavrus, Albrecht Leonhardt, Bernd Büchner and Jürgen Eckert

      Version of Record online: 5 NOV 2012 | DOI: 10.1002/cvde.201206991

      Carbon nanotubes (CNTs) are grown by catalytic CVD on Al foils using a variety of supported catalyst combinations. The morphology of the nanotube arrays is found to be dependent on the nature of the catalyst combination used. Thermodynamic calculations are performed to clearly understand the correlation between the chemical constitution of catalyst mixtures and the morphology of the resulting nanotube arrays.

    10. Deposition of Au Thin Films and Nanoparticles by MOCVD (pages 336–342)

      Roman G. Parkhomenko, Natalia B. Morozova, Galina I. Zharkova, Yuri V. Shubin, Sergey V. Trubin, Vladimir V. Kriventsov, Boris M. Kuchumov, Tatiana P. Koretskaya and Igor K. Igumenov

      Version of Record online: 9 NOV 2012 | DOI: 10.1002/cvde.201207004

      Using MOCVD, gold films and arrays of gold nanoparticles are obtained from volatile organometallic dimethylgold(III) complexes with O, N, S donor ligands. The deposition processes are carried out within an LPCVD reactor with additional VUV stimulation, with and without hydrogen as the reactant gas. The influence of the structure of the precursor on the morphology, structure, and composition of the thin gold films and gold nanoparticles are investigated.

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