Chemical Vapor Deposition

Cover image for Vol. 20 Issue 1-2-3

March 2014

Volume 20, Issue 1-2-3

Pages 1–97

  1. Cover Picture

    1. Top of page
    2. Cover Picture
    3. Masthead
    4. Contents
    5. Communication
    6. Full Papers
    1. You have free access to this content
      Cover image from A. M. Zhu and co-workers (Chem. Vap. Deposition 2014, 20, 8)

      Article first published online: 6 MAR 2014 | DOI: 10.1002/cvde.201471231

      Thumbnail image of graphical abstract

      Deposition of TiO2 films at ambient temperature and pressure on moving substrates through facile and fast CVD is presented. This features the hydrolysis and condensation reactions of TTIP and water vapor. The as-deposited film of amorphous TiO2 enriched with OH groups results in very high photocatalytic activity under UV-C light.

  2. Masthead

    1. Top of page
    2. Cover Picture
    3. Masthead
    4. Contents
    5. Communication
    6. Full Papers
    1. Chem. Vap. Deposition (1–2–3/2014)

      Article first published online: 6 MAR 2014 | DOI: 10.1002/cvde.201471232

  3. Contents

    1. Top of page
    2. Cover Picture
    3. Masthead
    4. Contents
    5. Communication
    6. Full Papers
    1. Chem. Vap. Deposition (1–2–3/2014) (pages 1–4)

      Article first published online: 6 MAR 2014 | DOI: 10.1002/cvde.201471233

  4. Communication

    1. Top of page
    2. Cover Picture
    3. Masthead
    4. Contents
    5. Communication
    6. Full Papers
    1. Potential of Hexyl Acrylate Monomer as an Initiator in Photo-initiated CVD (pages 5–7)

      Aravind Suresh, Daniel Anastasio and Daniel D. Burkey

      Article first published online: 20 NOV 2013 | DOI: 10.1002/cvde.201304322

      The potential of hexyl acrylate as an initiator in photo-initiated (pi) CVD is explored by demonstrating its auto-polymerization under ultraviolet (UV) radiation of wavelength 254 nm. Deposition of poly(hexyl acrylate) films on silicon substrates proceeds at high rates, approaching 1.7 µm min−1, at a stage temperature of 12.1°C, and the process is observed to be adsorption controlled.

  5. Full Papers

    1. Top of page
    2. Cover Picture
    3. Masthead
    4. Contents
    5. Communication
    6. Full Papers
    1. Facile and Fast Deposition of Amorphous TiO2 Film under Atmospheric Pressure and at Room Temperature, and its High Photocatalytic Activity under UV-C Light (pages 8–13)

      Zhi-Guang Sun, Xiao-Song Li, Xiaobing Zhu, Xiao-Qing Deng, Da-Lei Chang and Ai-Min Zhu

      Article first published online: 18 NOV 2013 | DOI: 10.1002/cvde.201307088

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      A facile and fast deposition of TiO2 film on a moving substrate under atmospheric pressure and at room temperature using TTIP and H2O as CVD precursors is reported for the first time. It is demonstrated that the as-deposited film is amorphous TiO2 and it is rich in surface OH groups. The as-deposited TiO2 films, on glass and PET substrates, exhibit very high photocatalytic activity for complete oxidation of HCHO to CO2 in simulated air under UV-C irradiation.

    2. Preparation of Few Layer Three-dimensional Graphene Networks by CVD for Energy Storage Applications (pages 14–22)

      Bo Tang and Guoxin Hu

      Article first published online: 6 MAR 2014 | DOI: 10.1002/cvde.201207052

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      Three-dimensional graphene networks (3DGNs) with controllable thicknesses are deposited by atmospheric pressure CVD with nickel form rod as a template. The 3DGNs-assisted energy storage device shows high performance, including high specific capacitance, large energy density, long cycle life, and great stability.

    3. Design Strategies for Reduced-scale Surface Composition Gradients via CVD Copolymerization (pages 23–31)

      Yaseen Elkasabi, Aftin M. Ross, Jonathan Oh, Michael P. Hoepfner, H. Scott Fogler, Joerg Lahann and Paul H. Krebsbach

      Article first published online: 18 NOV 2013 | DOI: 10.1002/cvde.201307057

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      A method for depositing reduced-scale polymer surface composition gradients is described. The method applies to both flat and three-dimensional substrates. A transport model fits the experimental measurements to physical parameters, enabling the calculation of gradient properties.

    4. Growth-rate Enhancement of High-quality, Low-loss CVD-produced Diamond Disks Grown for Microwave Windows Application (pages 32–38)

      Sergey Bogdanov, Anatoly Vikharev, Aleksei Gorbachev, Anatoly Muchnikov, Dmitry Radishev, Nikolai Ovechkin and Vladimir Parshin

      Article first published online: 12 NOV 2013 | DOI: 10.1002/cvde.201307058

      The effect of nitrogen addition on the MPACVD synthesis of polycrystalline diamond is investigated with the aim of growth-rate enhancement of high-quality, low-loss CVD-produced diamond disks. Experiments are performed at microwave power densities of 40 and 110 W cm-3 using a 2.45 GHz microwave reactor. The amount of added nitrogen needed to grow CVD disks of high quality (suitable for application in microwave windows) 2.5 times faster compared with the nitrogen-free synthesis, is determined.

    5. tert-Butylethynyl-parylene and Phenylethynyl-parylene (pages 39–43)

      Jay J. Senkevich

      Article first published online: 31 OCT 2013 | DOI: 10.1002/cvde.201307071

      Two cross-linkable parylene polymers, tert-butylethynyl and phenylethynyl, are deposited via the well-known Gorham method, from a unique scalable synthesis route to their respective cyclophane precursors. They are both stable in vacuum to 350°C, however the tert-butylethynyl variant has a much lower index of refraction of 1.5894 and is optically isotropic compared to phenylethynyl, which is highly negatively birefringent and has a much higher index of refraction (1.6482). Both have the potential to be solvent-soluble, much like parylene E.

    6. Effect of Annealing Temperature on Microstructure and UV Light Photocatalytic Activity of TiO2 Films Grown by Atmospheric Pressure CVD (pages 44–50)

      Chin Sheng Chua, Xiaoqin Fang, Xiaofeng Chen, Ooi Kiang Tan, Man Siu Tse, Andrew McIntosh Soutar and Xingzhao Ding

      Article first published online: 6 NOV 2013 | DOI: 10.1002/cvde.201207015

      The effect of annealing on the photocatalytic properties of TiO2 thin films produced using atmospheric pressure CVD is investigated. Photocatalytic degradation of stearic acid shows a decrease caused by two mechanisms: an increase in defects states (O- and Ti vacancies) resulting in recombination of electrons and holes, and formation of large rutile grains with limited heterojunction semiconductor effects with anatase film.

    7. The Role of the Gas Phase in Graphene Formation by CVD on Copper (pages 51–58)

      Pierre Trinsoutrot, Caroline Rabot, Hugues Vergnes, Alexandru Delamoreanu, Aziz Zenasni and Brigitte Caussat

      Article first published online: 31 OCT 2013 | DOI: 10.1002/cvde.201307075

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      Graphene synthesis by CVD on copper foils is experimentally studied at 1000°C under various methane partial pressures. A decrease in the carbon supply enables the formation of larger graphene flakes with fewer layers and fewer crystalline defects. The influence of copper foil confinement is shown on graphene nucleation and growth. To obtain a better understanding of the phenomenon occurring in the gas phase, methane pyrolysis is simulated using the Fluent Ansys® code.

    8. New Dimethyl(norbornadienyl)platinum(II) Precursors for Platinum MOCVD (pages 59–68)

      William Maudez, Christelle Roy, Phong Dinh Tran, Cyril Thurier, Farah Karmous and Pascal Doppelt

      Article first published online: 6 MAR 2014 | DOI: 10.1002/cvde.201307084

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      The one-pot synthesis, characterization, and thermal properties of (nbd)PtMe2 (1) and four new, air-stable, halogen-free, norbornadienyl platinum derivatives (R-nbd)PtMe2, R = 7-Me (2), 7-Et (3), 7-iPr (4), and 2-Et (5) are presented. The complexes 1 and 5 are shown to be highly suitable for the low-temperature, liquid delivery CVD of pure platinum thin films.

    9. Combinatorial Atmospheric Pressure CVD of a Composite TiO2/SnO2 Thin Film (pages 69–79)

      Sanjayan Sathasivam, Andreas Kafizas, Sapna Ponja, Nicholas Chadwick, Davinder S. Bhachu, Salem M. Bawaked, Abdullah Y. Obaid, Shaeel Al-Thabaiti, Sulaiman N. Basahel, Claire J. Carmalt and Ivan P. Parkin

      Article first published online: 21 FEB 2014 | DOI: 10.1002/cvde.201307081

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      A TiO2/SnO2 composite film with varying amounts of TiO2 and SnO2 concentration across a single substrate is deposited using combinatorial APCVD and is fully characterized. The photocatalytic activity of the film across fifty grid points is determined using Resazurin redox dye, and the sheet resistance is studied using a four-point probe via the Van der Pauw method.

    10. Aluminizing of Nickel Alloys by CVD. The Effect of HCl Flow (pages 80–90)

      Bartek Wierzba, Katarzyna Tkacz-Śmiech, Andrzej Nowotnik and Kamil Dychtoń

      Article first published online: 21 FEB 2014 | DOI: 10.1002/cvde.201307090

      Thumbnail image of graphical abstract

      A model describing mass transport in nickel alloys subject to aluminization by CVD is proposed. The possibility of two-phase zone formation in the ternary system is included. Calculations for pure nickel, CMSX-4, and MAR-M200 + Hf are performed and the results are compared with the data from CVD experiments. The SEM image of the cross-section of MAR-M200 + Hf aluminized for 6 h at 1273 K is reported.

    11. Visible Light Photocatalytic Activity in AACVD-Prepared N-modified TiO2 Thin Films (pages 91–97)

      Veronica Diesen, Charles W. Dunnill, Joseph C. Bear, Steve Firth, Mats Jonsson and Ivan P. Parkin

      Article first published online: 21 FEB 2014 | DOI: 10.1002/cvde.201307086

      Nitrogen-modified TiO2 thin films are obtained from aerosol-assisted (AA)CVD-prepared samples via a post-treatment method of immersion in liquid ammonia and calcining at 500°C. The films are characterized and shown to have visible light photocatalytic activity. Visible light photoactivity is shown by measuring formaldehyde formation from the probe molecule tris(hydroxymethyl)aminomethane.

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