Chemical Vapor Deposition

Cover image for Chemical Vapor Deposition

March 1996

Volume 2, Issue 2

Pages fmi–fmi, 33–77

  1. Masthead

    1. Top of page
    2. Masthead
    3. Essays
    4. Articles
    5. Communications
    6. Full Papers
    7. Research Newss
    1. Masthead (page fmi)

      Version of Record online: 4 OCT 2004 | DOI: 10.1002/cvde.19960020201

  2. Essays

    1. Top of page
    2. Masthead
    3. Essays
    4. Articles
    5. Communications
    6. Full Papers
    7. Research Newss
    1. Eurocvd 10—A nostalgic retrospect (pages 33–35)

      Prof. Bernard J. Aylett

      Version of Record online: 4 OCT 2004 | DOI: 10.1002/cvde.19960020202

      La Dolce CVD Vita!

      Professor Aylett captures the flavor of the feast of scientific contributions and the culinary and alcoholic delights enjoyed by delegates at EUROCVD 10 in Lido di Jesolo. This highly successful meeting was the latest in the biennial series and it showed the breadth and depth of the CVD community in the European arena. In particular, the wide range of applications of CVD presented both in lectures and on posters, illustrated the extensive variety of practical targets for CVD workers to aim at in the future.

  3. Articles

    1. Top of page
    2. Masthead
    3. Essays
    4. Articles
    5. Communications
    6. Full Papers
    7. Research Newss
    1. Hydrogen in Cvd Diamond Films (pages 37–43)

      Prof. Karen Mcnamara Rutledge and Prof. Karen K. Gleason

      Version of Record online: 4 OCT 2004 | DOI: 10.1002/cvde.19960020203

      CVD diamond films have great commercial potential, but the ubiquitous presence of hydrogen in the films, no matter what deposition method is used, could have serious implications for the properties of the films. A hydrogen-terminated diamond surface is shown schematically in the Figure. This article reviews the application of a range of characterization techniques for the study of the effects of hydrogen on CVD diamond.

  4. Communications

    1. Top of page
    2. Masthead
    3. Essays
    4. Articles
    5. Communications
    6. Full Papers
    7. Research Newss
    1. Atomic force microscopy on (001) surfaces of GaAs MOVPE layers (pages 44–48)

      Dr. Ines Pietzonka, Dr. Dietmar Hirsch, Dr. Volker Gottschalch, Dr. Reinhard Schwabe, Dr. Reiner Franzheld, Prof. Klaus Bente and Prof. Frieder Bigl

      Version of Record online: 4 OCT 2004 | DOI: 10.1002/cvde.19960020204

      Low dimensional materials are widely used in novel opto- and/or microelectronic devices. Therefore it is of great importance and fundamental interest to determine the correlation between variations of the crystal surface during growth and in situ development of microstructures. This paper reports on multistep formation of MOVPE GaAs analyzed by AFM, presenting and discussing images and cross-section measurements of GaAs layers grown under various conditions.

    2. Aerosol-assisted chemical vapor deposition of CeO2-doped Y2O3-stabilized ZrO2 films on porous ceramic supports for membrane applications (pages 48–51)

      Changfeng Xia, Prof. Timothy L. Ward and Dr. Robert W. Schwartz

      Version of Record online: 4 OCT 2004 | DOI: 10.1002/cvde.19960020205

      Dense stabilized zirconia has a number of important applications because of its oxygen ion conductivity and excellent thermal and chemical stability. Conventional multicomponent CVD has a number of problems, including low precursor delivery rates and premature decomposition. The results in this paper suggest that the novel use of aerosol-assisted CVD can be used to overcome these problems. The Figure shows the cross section of a CeO2-doped Y2O3-stabilized ZrO2 film deposited by AACVD.

    3. The first monomeric, volatile bis-azide single-source precursor to Gallium nitride thin films (pages 51–55)

      Alexander Miehr, Dr. Oliver Ambacher, Walter Rieger, Thomas Metzger, Prof. Eberhard Born and Dr. Roland A. Fischer

      Version of Record online: 4 OCT 2004 | DOI: 10.1002/cvde.19960020206

      Group III nitrides are strong candidates for use in light emitting diodes and semiconductor lasers. There are, though, a number of shortcomings of currently available precursors. There is a need for less toxic and pyrophoric precursors that can be used for low temperature deposition. The single source nitrogen-rich GaN precursor reported here, building on the concept of intramolecularly based adduct stabilization, shows considerable promise for producing high quality layers.

  5. Full Papers

    1. Top of page
    2. Masthead
    3. Essays
    4. Articles
    5. Communications
    6. Full Papers
    7. Research Newss
    1. Considerations of the production of C60 thin films by PECVD, combustion, or pyrolysis (pages 57–68)

      Dr. Phillippe Rocabois, Prof. Michael L. Hitchman and Dr. Sarkis H. Shamlian

      Version of Record online: 4 OCT 2004 | DOI: 10.1002/cvde.19960020207

      C60 is one of the most interesting molecules to be discovered in recent years. There are a wide range of potential applications, including electronic devices, but this will require the production of good quality films. This paper reports on preliminary attempts to produce C60 film by PECVD and presents a thermodynamic analysis which shows that careful control of reaction parameters (see Figure) could be critical in achieving good yields of C60 by a continuous process.

    2. Atomic layer epitaxy of strontium sulfide thin films using in situ synthesized strontium precursors (pages 69–74)

      Pekka Soininen, Erja Nykänen, Prof. Lauri Niinistö and Prof. Markku Leskelä

      Version of Record online: 4 OCT 2004 | DOI: 10.1002/cvde.19960020208

      Strontium sulfide is a blue or blue-green electroluminescent phosphor. For atomic layer epitaxy (ALE) there is a paucity of precursors with a sufficiently high vapor pressure to be of practical use. A direct method of preparation of the Sr precursor is described, which takes place inside the reactor using ligand vapor and a solid Sr source without any additional solvents. This strategy produces high growth rates of good quality SrS films.

  6. Research Newss

    1. Top of page
    2. Masthead
    3. Essays
    4. Articles
    5. Communications
    6. Full Papers
    7. Research Newss
    1. Thin films of early transition metal monophosphides (pages 75–77)

      Dr. Suren T. Lewkebandara and Prof. Charles H. Winter

      Version of Record online: 4 OCT 2004 | DOI: 10.1002/cvde.19960020209

      Early transition metal phosphides possess remarkable properties that promise potential applications, particularly as thin films. This article aims to provide a broad understanding of the preparation methods, structural features, analysis, and properties of these materials. It is pointed out that developments in the bulk synthesis of metal phosphides may reveal chemical principles relevant for new CVD processes. Investigations of CVD synthetic routes could lead to a greater willingness to use these novel phosphides in various applications.

SEARCH

SEARCH BY CITATION