Henry A. Luten, Prof. William S. Rees Jr and Virgil L. Goedken
A wide variety of advanced materials contain yttrium. CVD has numerous advantages over alternative methods for depositing thin, yttrium containing films, but requires suitable precursors. An extensive investigation of several γ-diketonate precursors, for example as shown in the accompanying structure, is presented here, together with a discussion of their volatility in terms of ligand symmetry. Films grown from the precursors have been characterized as well.