Metal-containing poly (p-xylylene) films by CVD: Poly (p-xylylene) with germanium crystals (pages 197–200)
Prof. Henning Hopf, Prof. Genrikh N. Gerasimov, Dr. Sergei N. Chavalun, Prof. Valerial I. Rozenberg, Dr. Elena L. Popova, Elena V. Nikolaeva, Dr. Evgenii I. Grogoriev, Dr. Sergei A. Zavjalov and Prof. Leonid I. Trakhtenberg
Version of Record online: 2 NOV 2004 | DOI: 10.1002/cvde.19970030407
Metal-containing polymer films are of interest for sensor, magnetic, nonlinear optical, and catalytic applications. This communication describes the preparation of poly(p-xylylene) coatings incorporating Ge crystals from Ge-containing paracyclophane monomer. Vapor pyrolysis of the monomer gives copolymer films with Ge fragments, which are thermally decomposed to Ge crystals. This leads to an increase in film conductivity and there is the potential for an application as a humidity sensor.