Investigation of the Mechanical Stability of Micro-Solid Oxide Fuel Cell Membranes Using Scanning Laser Vibrometry



Scanning laser vibrometry was used to investigate the mechanical stability of free-standing micro-solid oxide fuel cell (micro-SOFC) membranes. Arrays of square-shaped 460 nm thin micro-SOFC membranes were fabricated on silicon substrates using pulsed laser deposition for the yttria-stabilized zirconia electrolyte and magnetron sputtering for the platinum electrodes. Resonance frequency, displacement and acceleration measurements were carried out using interferometry analysis of the membrane reflection. The resonance frequencies scale with the reciprocal of the membrane length. At the resonance, the 390 × 390 μm2 micro-SOFC membranes exhibit an out-of-plane displacement of ca. 1.2 μm only. All free-standing micro-SOFC membranes survive the resonant vibration without rupturing. These results are promising for the failure-free implementation of micro-SOFC in portable electronic devices.