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Keywords:

  • catalytic decomposition;
  • catalytic reduction;
  • electronics manufacturing;
  • NH3 reducing agent;
  • N2O emission

Abstract

Electronics manufacturing industries have rapidly developed in South Korea. To reduce the use of fluorinated gases having high global warming potential (GWP) in their processes, companies have recently attempted to replace these gases with nitrous oxide (N2O). Unfortunately, N2O itself has a GWP of 310 and is one of the main greenhouse gases. The electronics manufacturing industries should therefore consider reducing N2O emissions from their processes. This study measured the N2O emission from a large display manufacturing plant in South Korea and investigated the removal of N2O at the site of the plant by either a catalytic decomposition process or a reduction process. We suggest a hybrid N2O reduction process to effectively reduce the N2O emissions of the electronics manufacturing industries. © 2012 Society of Chemical Industry and John Wiley & Sons, Ltd