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Review Article
Focused ion beams techniques for nanomaterials characterization
Article first published online: 31 MAY 2006
DOI: 10.1002/jemt.20324
Copyright © 2006 Wiley-Liss, Inc.
Issue
1097-0029/asset/cover.gif?v=1&s=43ac34a0c5790efa9b3c9852600b3b1d1fb6e338 "Microscopy Research and Technique")
Microscopy Research and Technique
Special Issue: “Nanomaterials Characterization Using Microscopy—Part II”
Volume 69, Issue 7, pages 538–549, July 2006
Additional Information
How to Cite
Langford, R. M. (2006), Focused ion beams techniques for nanomaterials characterization. Microsc. Res. Tech., 69: 538–549. doi: 10.1002/jemt.20324
Publication History
- Issue published online: 26 JUN 2006
- Article first published online: 31 MAY 2006
- Manuscript Accepted: 21 NOV 2004
- Manuscript Received: 20 JUL 2004
- Abstract
- References
- Cited By
Keywords:
- focused ion beam system;
- TEM sample preparation;
- dual platform system
Abstract
Focused ion beam and dual platform systems have, over the last 10 years, become a main stay of sample preparation for material analysis. In this article the merits of using these systems are discussed and the three main techniques used to prepare cross-section specimens for transmission electron microscopy (TEM) are both discussed and compared with emphasis being placed on the tricks that users do to make the lamellae as thin as possible and with a minimum of damage at their sidewalls. Other techniques such as serial slicing for three-dimensional reconstruction and the preparation of plan-view specimens are also summarized. Microsc. Res. Tech., 2006. © 2006 Wiley-Liss, Inc.