Correction of optical distortions in dry depth profiling with confocal Raman microspectroscopy
Article first published online: 19 JAN 2011
Copyright © 2011 John Wiley & Sons, Ltd.
Journal of Raman Spectroscopy
Volume 42, Issue 6, pages 1330–1334, June 2011
How to Cite
Tomba, J. P., de la Paz Miguel, M. and Perez, C. J. (2011), Correction of optical distortions in dry depth profiling with confocal Raman microspectroscopy. J. Raman Spectrosc., 42: 1330–1334. doi: 10.1002/jrs.2843
- Issue published online: 17 JUN 2011
- Article first published online: 19 JAN 2011
- Manuscript Accepted: 14 OCT 2010
- Manuscript Received: 22 JUN 2010
- ANPCYT. Grant Number: PICT06-1359
- confocal Raman microspectroscopy;
- depth profiling;
- depth response;
We present a generalized approach to obtain improved Raman intensity profiles from in-depth studies performed by confocal Raman microspectroscopy (CRM) with dry objectives. The approach is based on regularized deconvolution of the as-measured confocal profile, through a kernel that simulates optical distortions due to diffraction, refraction and collection efficiency on the depth response. No specific shape or restrictions for the recovered profile are imposed. The strategy was tested by probing, under different instrumental conditions, a series of model planar interfaces, generated by the contact of polymeric films of well-defined thickness with a substrate. Because of the aforementioned optical distortions, the as-measured confocal response of the films appeared highly distorted and featureless. The signal computed after deconvolution recovers all the films features, matching very closely with the response expected. Copyright © 2011 John Wiley & Sons, Ltd.