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Highly ordered periodic array of metallic nanodots fabricated through template-assisted nanopatterning and its use for surface-enhanced Raman scattering spectroscopy of flexible crystalline-silicon nanomembranes

Authors

  • L. Nataraj,

    1. Department of Electrical and Computer Engineering, University of Delaware, Newark, DE 19716, USA
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  • S. G. Cloutier

    Corresponding author
    1. Department of Electrical and Computer Engineering, University of Delaware, Newark, DE 19716, USA
    2. Delaware Biotechnology Institute, University of Delaware, Newark, DE 19711, USA
    • Department of Electrical and Computer Engineering, University of Delaware, Newark, DE 19716, USA.
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Abstract

We report on the fabrication of highly uniform periodic arrays of metallic nanodots formed on glass substrates through a facile anodic aluminum oxide template-assisted process and their use in selective surface-enhanced Raman scattering spectroscopy to probe the structural properties of flexible crystalline-silicon nanomembranes deposited on polymer substrates. A 14-fold enhancement in Raman scattering was observed from the thin flexible silicon membranes deposited on polyethylene terephthalate substrates, which were used to probe the internal strains in the silicon nanomembrane as a function of the bending radius. Copyright © 2011 John Wiley & Sons, Ltd.

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