Micro Materials Processing
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Thin film LEDs gaining ground
Excimer laser lift-off enables high brightness LED production
Article first published online: 9 MAY 2011
DOI: 10.1002/latj.201190027
Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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How to Cite
Delmdahl, R., Kunzer, M. and Schwarz, U. (2011), Thin film LEDs gaining ground. LTJ, 8: 48–52. doi: 10.1002/latj.201190027
Publication History
- Issue published online: 9 MAY 2011
- Article first published online: 9 MAY 2011
- Abstract
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Abstract
Excimer laser-based Laser Lift-Off (LLO) is a key enabling technology in fabricating thin film LEDs. This article reviews the market drivers for high brightness LEDs, current LED designs and their limitations and the basics of thin film devices as well as the LLO process for manufacturing them.

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