Micro Materials Processing

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Micromachining using high-power picosecond lasers

Comparison of various materials

  1. Uli Engelhardt,
  2. Jens Hildenhagen,
  3. Prof. Dr. Klaus Dickmann*

Article first published online: 19 SEP 2011

DOI: 10.1002/latj.201190056

Issue

Laser Technik Journal

Laser Technik Journal

Volume 8, Issue 5, pages 32–35, September 2011

Additional Information

How to Cite

Engelhardt, U., Hildenhagen, J. and Dickmann, K. (2011), Micromachining using high-power picosecond lasers. LTJ, 8: 32–35. doi: 10.1002/latj.201190056

Author Information

  1. Laserzentrum FH Münster (LFM), Stegerwaldstraße 39, 48565 SteinfurtGermany, Phone: +49 (0) 2551 962 324

*Laserzentrum FH Münster (LFM), Stegerwaldstraße 39, 48565 SteinfurtGermany, Phone: +49 (0) 2551 962 324, www.lfm-online.de

Publication History

  1. Issue published online: 19 SEP 2011
  2. Article first published online: 19 SEP 2011

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Abstract

For the micromachining of temperature-sensitive and brittle-rigid components ultra short pulsed lasers are being used more and more. Due to the short pulse durations in the femto- and pico second range such systems with only a few Watt of average power have high pulsed peak powers of an order of 10 MW. This allows machining a wide range of materials including transparent materials via non-linear absorption, enabled by the high intensity in the focus of radiation. The intensity can reach values of several TW/cm2. This leads to the immediate evaporation of the material, ideally, without melt and burr.

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