Micro Materials Processing

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Micromachining using high-power picosecond lasers

Comparison of various materials

  1. Uli Engelhardt,
  2. Jens Hildenhagen,
  3. Prof. Dr. Klaus Dickmann*

Article first published online: 19 SEP 2011

DOI: 10.1002/latj.201190056

Issue

Laser Technik Journal

Laser Technik Journal

Volume 8, Issue 5, pages 32–35, September 2011

Additional Information

How to Cite

Engelhardt, U., Hildenhagen, J. and Dickmann, K. (2011), Micromachining using high-power picosecond lasers. LTJ, 8: 32–35. doi: 10.1002/latj.201190056

Author Information

  1. Laserzentrum FH Münster (LFM), Stegerwaldstraße 39, 48565 SteinfurtGermany, Phone: +49 (0) 2551 962 324

*Laserzentrum FH Münster (LFM), Stegerwaldstraße 39, 48565 SteinfurtGermany, Phone: +49 (0) 2551 962 324, www.lfm-online.de

Publication History

  1. Issue published online: 19 SEP 2011
  2. Article first published online: 19 SEP 2011

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REFERENCES

  • 1
    S. Stroj: “Ultrakurz und deshalb schonend”, Laser + Produktion, (2010), 46–47
  • 2
    A. Tünnermann, S. Nolte, J. Limpert: “Femtosecond vs. Picosecond Laser Material Processing”, Laser Technik Journal, (2010), 1, 34
  • 3
    S. Weiler, D. Sutter, C. Koerber: “Von der Idee zum fertigen Produkt”, Laser Technik Journal, (2008), 5, 43
    Direct Link:
  • 4
    O. Haupt, R. Kling: “Laser in der Halbleiterbearbeitung”, Laser Technik Journal, (2009), 4, 19
    Direct Link:
  • 5
    Sascha Weiler: “Scheibenlaser für die Industrie”, Laser+Photonik, (2008), 5, 62
  • 6
    J. Krüger, M. Lenzner et al.: “Single- and multi-pulse femtosecond laser ablation of optical filter materials”, Applied Surface Science, (2003), 233
  • 7
    M. Weikert: “Oberflächenstrukturieren mit ultrakurzen Laserpulsen”, Dissertation, University Stuttgart, 2005
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