Research Article

Numerical modelling of electromechanical coupling using fictitious domain and level set methods

  1. Andriy Andreykiv*,
  2. Daniel J. Rixen

Article first published online: 8 JUN 2009

DOI: 10.1002/nme.2636

Issue

International Journal for Numerical Methods in Engineering

International Journal for Numerical Methods in Engineering

Volume 80, Issue 4, pages 478–506, 22 October 2009

Additional Information

How to Cite

Andreykiv, A. and Rixen, D. J. (2009), Numerical modelling of electromechanical coupling using fictitious domain and level set methods. International Journal for Numerical Methods in Engineering, 80: 478–506. doi: 10.1002/nme.2636

Author Information

  1. Department of Precision and Microsystems Engineering, Faculty of 3ME, Delft University of Technology, Mekelweg 2, 2628CD, Delft, The Netherlands

*Department of Precision and Microsystems Engineering, Faculty of 3ME, Delft University of Technology, Mekelweg 2, 2628CD, Delft, The Netherlands

Publication History

  1. Issue published online: 25 SEP 2009
  2. Article first published online: 8 JUN 2009
  3. Manuscript Accepted: 24 MAR 2009
  4. Manuscript Revised: 4 MAR 2009
  5. Manuscript Received: 5 DEC 2008

Funded by

  • MicroNed Program

SEARCH

SEARCH BY CITATION

ARTICLE TOOLS

Get PDF (922K)

Keywords:

  • electromechanical coupling;
  • fictitious domain method;
  • Lagrange multipliers;
  • level set method;
  • finite element method;
  • micro-electro mechanical systems

Abstract

We present a finite element formulation for simulation of electromechanical coupling using a combination of fictitious domain and level set methods. The electric field is treated with a fixed (Eulerian-like) mesh, whereas the structure (taken as a perfect conductor) is modelled with a conventional Lagrangian approach. The compatibility between the potential of the conductor and of the electric domain is obtained by introducing a Lagrange multiplier function, defined on the boundary of the conductor. The electromechanical forces are obtained using a variational formulation for the coupled electromechanical domain. We use a Heaviside function on the level set to remove the electric energy in the conductor domain. Results are presented for an radio frequency switch and an element of a comb drive. Copyright © 2009 John Wiley & Sons, Ltd.

Get PDF (922K)