Measurement Techniques

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More Moore & more quality

Metrology solutions for the production of microelectronic devices

  1. Jens Bonerz*

Article first published online: 4 FEB 2011

DOI: 10.1002/opph.201190141

Issue

Optik & Photonik

Optik & Photonik

Volume 5, Issue 4, pages 47–49, December 2010

Additional Information

How to Cite

Bonerz, J. (2010), More Moore & more quality. Optik & Photonik, 5: 47–49. doi: 10.1002/opph.201190141

Author Information

  1. Fries Research & Technology Gmbh (FRT), Friedrich-Ebert-Straße, 51429 Bergisch Gladbach, Germany, Phone: +49 (0)2204 843205

*Fries Research & Technology Gmbh (FRT), Friedrich-Ebert-Straße, 51429 Bergisch Gladbach, Germany, Phone: +49 (0)2204 843205, http://www.frt-gmbh.com

Publication History

  1. Issue published online: 4 FEB 2011
  2. Article first published online: 4 FEB 2011

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Abstract

The complexity of integrated circuits doubles at a remarkable speed — each 18 to 24 months, according to industry insiders. In 1965, Gordon Moore discovered this effect for the first time. Until today, pursuing Moore's Law poses a significant challenge for many industrial sectors because higher complexity in products means more complexity with regard to quality assurance during production as well. Optical surface inspection and metrology solutions have proven to be the right choice when it comes to enabling product innovations within short development cycles.

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