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Modelling and Optimization of a Silicon Tuning Fork Gyroscope

  1. A. Kugi1,
  2. D. Thull1,
  3. H. Seidel2

Article first published online: 5 NOV 2004

DOI: 10.1002/pamm.200410015

Issue

PAMM

PAMM

Volume 4, Issue 1, pages 59–62, December 2004

Additional Information

How to Cite

Kugi, A., Thull, D. and Seidel, H. (2004), Modelling and Optimization of a Silicon Tuning Fork Gyroscope. Proc. Appl. Math. Mech., 4: 59–62. doi: 10.1002/pamm.200410015

Author Information

  1. 1

    Chair of System Theory and Automatic Control, Saarland University, Germany

  2. 2

    Chair of Micromechanics, Microfluidics/Microactuators, Saarland University, Germany

Publication History

  1. Issue published online: 5 NOV 2004
  2. Article first published online: 5 NOV 2004

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Abstract

This contribution deals with the systematic derivation of an analytical model for a silicon tuning fork gyroscope with piezoelectric drive and piezoresistive read-out. The mathematical model serves as a basis for optimizing the overall sensor structure, for testing the electronic circuitry and for investigating the influence of disturbances, e.g. due to fabrication tolerances, on the measurement quality. (© 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

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