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Modelling and Optimization of a Silicon Tuning Fork Gyroscope

  1. A. Kugi1,
  2. D. Thull1,
  3. H. Seidel2

Article first published online: 5 NOV 2004

DOI: 10.1002/pamm.200410015

Issue

PAMM

PAMM

Volume 4, Issue 1, pages 59–62, December 2004

Additional Information

How to Cite

Kugi, A., Thull, D. and Seidel, H. (2004), Modelling and Optimization of a Silicon Tuning Fork Gyroscope. Proc. Appl. Math. Mech., 4: 59–62. doi: 10.1002/pamm.200410015

Author Information

  1. 1

    Chair of System Theory and Automatic Control, Saarland University, Germany

  2. 2

    Chair of Micromechanics, Microfluidics/Microactuators, Saarland University, Germany

Publication History

  1. Issue published online: 5 NOV 2004
  2. Article first published online: 5 NOV 2004

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References

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    Kanda, Y., A Graphical Representation of the Piezoresistance Coefficients in Silicon, IEEE Trans. on Electron Devices, Vol. ED-29, No. 1, pp. 64-70, 1982.
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    Magrab, E. B., Vibrations of Elastic Members, Sijthoff & Noordhoff, Alphen aan den Rijn, 1979.
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    Meirovitch, L., Dynamics and Control of Structures, John Wiley & Sons, New York, 1990.
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    Nowacki, W., Dynamic Problems of Thermoelasticity, Noordhoff International Publishing, Warszawa, 1975.
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    Spong, M. W. and Vidyasagar, M., Robot Dynamics and Control, John Wiley & Sons, New York, 1989.
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    Voss, R., Bauer, K., Ficker, W., Gleissner, T., Kupke, W., Rose, M., Sassen, S., Schalk, J., Seidel, H. and Stenzel, E., Silicon angular rate sensor for automotive applications with piezoelectric drive and piezoresistive read-out, In: Proc. of The Ninth International Conference on Sensors And Actuators - Transducers '97, June 16-19 1997, Chicago, USA, pp. 879-882, 1997.
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    Yazdi, N., Ayazi, F. and Najafi, K., Micromachined Inertial Sensors, In: Proc. of the IEEE, Vol. 86, No. 8, pp. 1640-1659, 1998.
  • [8]
    Ziegler, F., Mechanics of Solids and Fluids (2nd ed.), Springer, New York, 1998.
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