High-rate deposition of a-Si:H thin layers for high-performance silicon heterojunction solar cells
Article first published online: 17 OCT 2011
Copyright © 2011 John Wiley & Sons, Ltd.
Progress in Photovoltaics: Research and Applications
Volume 21, Issue 3, pages 326–331, May 2013
How to Cite
Liu, C.-S., Wu, C.-Y., Chen, I.-W., Lee, H.-C. and Hong, L.-S. (2013), High-rate deposition of a-Si:H thin layers for high-performance silicon heterojunction solar cells. Prog. Photovolt: Res. Appl., 21: 326–331. doi: 10.1002/pip.1189
- Issue published online: 22 APR 2013
- Article first published online: 17 OCT 2011
- Manuscript Accepted: 15 AUG 2011
- Manuscript Revised: 7 JUL 2011
- Manuscript Received: 9 MAY 2011
- National Science Council of Taiwan and Sino American Silicon Products. Grant Number: NSC 100-3113-E-011-001-CC2 and 99AN281
- Solar Optoelectronics Development Center of National Taiwan University of Science and Technology
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