This article is a US Government work and, as such, is in the public domain in the United States of America.
Formation of deprotected fuzzy blobs in chemically amplified resists†
Article first published online: 20 JUL 2004
Published 2004 Wiley Periodicals, Inc.
Journal of Polymer Science Part B: Polymer Physics
Special Issue: Special Issue on Recent Developments in Polymer Science as Determined by Neutron Scattering
Volume 42, Issue 17, pages 3063–3069, 1 September 2004
How to Cite
Jones, R. L., Hu, T., Lin, E. K., Wu, W.-L., Goldfarb, D. L., Angelopoulos, M., Trinque, B. C., Schmid, G. M., Stewart, M. D. and Willson, C. G. (2004), Formation of deprotected fuzzy blobs in chemically amplified resists. J. Polym. Sci. B Polym. Phys., 42: 3063–3069. doi: 10.1002/polb.20168
- Issue published online: 20 JUL 2004
- Article first published online: 20 JUL 2004
- Manuscript Accepted: 30 JAN 2004
- Manuscript Received: 31 OCT 2003
- Defense Advanced Research Projects Agency (DARPA) Advanced Lithography Program. Grant Number: N66001-00-C-8083
- National Institute of Standards and Technology Office of Microelectronics Programs
- National Institute of Standards and Technology National Research Council postdoctoral fellowship
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