Single-Chamber Deposition of Multilayer Barriers by Plasma Enhanced and Initiated Chemical Vapor Deposition of Organosilicones
Article first published online: 1 FEB 2010
Copyright © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Plasma Processes and Polymers
Volume 7, Issue 7, pages 561–570, July 22, 2010
How to Cite
Coclite, A. M., Ozaydin-Ince, G., Palumbo, F., Milella, A. and Gleason, K. K. (2010), Single-Chamber Deposition of Multilayer Barriers by Plasma Enhanced and Initiated Chemical Vapor Deposition of Organosilicones. Plasma Processes Polym., 7: 561–570. doi: 10.1002/ppap.200900139
- Issue published online: 12 JUL 2010
- Article first published online: 1 FEB 2010
- Manuscript Accepted: 18 NOV 2009
- Manuscript Revised: 12 NOV 2009
- Manuscript Received: 26 AUG 2009
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