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Retarding Field Analyzer for Ion Energy Distribution Measurement Through a Radio-Frequency or Pulsed Biased Sheath

  1. David Gahan1,2,*,
  2. Borislav Dolinaj2,
  3. Chanel Hayden1,
  4. Michael B. Hopkins1,2

Article first published online: 16 JUN 2009

DOI: 10.1002/ppap.200931607

Issue

Plasma Processes and Polymers

Plasma Processes and Polymers

Supplement: Eleventh International Conference on Plasma Surface Engineering (PSE2008)

Volume 6, Issue Supplement 1, pages S643–S648, June 2009

Additional Information

How to Cite

Gahan, D., Dolinaj, B., Hayden, C. and Hopkins, M. B. (2009), Retarding Field Analyzer for Ion Energy Distribution Measurement Through a Radio-Frequency or Pulsed Biased Sheath. Plasma Processes Polym., 6: S643–S648. doi: 10.1002/ppap.200931607

Author Information

  1. 1

    National Centre for Plasma Science and Technology, Dublin City University, Glasnevin, Dublin 9, Ireland

  2. 2

    Impedans Ltd., Invent Centre, Dublin City University, Glasnevin, Dublin 9, Ireland

*Impedans Ltd., Invent Centre, Dublin City University, Glasnevin, Dublin 9, Ireland.

Publication History

  1. Issue published online: 28 OCT 2009
  2. Article first published online: 16 JUN 2009
  3. Manuscript Accepted: 4 MAY 2009
  4. Manuscript Received: 15 SEP 2008

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