Full Paper

Nanoparticle Synthesis and Growth in a Continuous Plasma Reactor from Organosilicon Precursors

  1. Christian Roth1,
  2. Gina Oberbossel1,
  3. Elizabeth Buitrago2,
  4. Roman Heuberger3,
  5. Philipp Rudolf von Rohr1,*

Article first published online: 7 FEB 2012

DOI: 10.1002/ppap.201100180

Issue

Plasma Processes and Polymers

Plasma Processes and Polymers

Volume 9, Issue 2, pages 119–134, February 2012

Additional Information

How to Cite

Roth, C., Oberbossel, G., Buitrago, E., Heuberger, R. and Rudolf von Rohr, P. (2012), Nanoparticle Synthesis and Growth in a Continuous Plasma Reactor from Organosilicon Precursors. Plasma Processes Polym., 9: 119–134. doi: 10.1002/ppap.201100180

Author Information

  1. 1

    ETH Zurich, Institute of Process Engineering, Sonneggstrasse 3, 8092 Zurich, Switzerland

  2. 2

    EPFL Lausanne, Nanoelectronic Devices, NANOLAB, 1015 Lausanne, Switzerland

  3. 3

    RMS Foundation, Bischmattstrasse 12, 2544 Bettlach, Switzerland

*ETH Zurich, Institute of Process Engineering, Sonneggstrasse 3, 8092 Zurich, Switzerland.

Publication History

  1. Issue published online: 9 FEB 2012
  2. Article first published online: 7 FEB 2012
  3. Manuscript Accepted: 29 NOV 2011
  4. Manuscript Revised: 25 NOV 2011
  5. Manuscript Received: 7 OCT 2011

Funded by

  • Claude & Giuliana Foundation (Switzerland)

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Keywords:

  • continuous reactor;
  • organosilicon precursors;
  • particles;
  • silicon oxide;
  • synthesis

Abstract

Thumbnail image of graphical abstract

Silica-like nanoparticles are produced from four different organosilicon monomers HMDSO, TMDSO, TEOS and TMOS in a continuous non-equilibrium plasma reactor. The nanoparticle synthesis is studied as a function of the process pressure, plasma power, gas velocity,and gas composition (Ar:O2:monomer). The morphology, mass production,and chemical composition of the plasma formed particlesare investigated. An adapted particle growth model for a continuous plasma reactor is introduced which explains the influence of the different process parameters on particle evolution. The morphology of the produced amorphous particles is similar to fumed silica, with primary particles in the size range of 10 nm building hard-agglomerates of several hundred nanometers during the synthesis.

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