This article is written solely for the purpose of promoting good safety practices and better safety research in the semiconductor industries. This article and the authors are not responsible or intent to incur any legal or insurance liability for the cases discussed.
Revisiting of a silane explosion in a photovoltaic fabrication plant†
Article first published online: 22 FEB 2007
Copyright © 2007 American Institute of Chemical Engineers (AIChE)
Process Safety Progress
Volume 26, Issue 2, pages 155–158, June 2007
How to Cite
Chang, Y.-Y., Peng, D.-J., Wu, H.-C., Tsaur, C.-C., Shen, C.-C., Tsai, H.-Y. and Chen, J.-R. (2007), Revisiting of a silane explosion in a photovoltaic fabrication plant. Proc. Safety Prog., 26: 155–158. doi: 10.1002/prs.10194
- Issue published online: 3 MAY 2007
- Article first published online: 22 FEB 2007
- fire and explosion;
- cylinder valve
A second possible cause of a previously described silane explosion is proposed based on a more detailed examination of the physical evidence. The explosion and fire occurred in a silane gas room in a photovoltaic fabrication plant. This investigation recommends more research to investigate the characteristics of a silane release and the resulting fires and explosions. Suggestions are also made for a better silane cylinder valve design and cabinet design. Silane leaks are difficult to detect; therefore the recommendations include the need for a silane gas detector to warn the operator when there are leaks. © 2007 American Institute of Chemical Engineers Process Saf Prog, 2007.