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Revisiting of a silane explosion in a photovoltaic fabrication plant

Authors

  • Yo-Yu Chang,

    1. Division of Occupational Safety, Institute of Occupational Safety and Health, Council of Labor Affairs, Executive Yuan, Shijr City, Taipei 221, Taiwan
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  • Deng-Jr Peng,

    1. Division of Occupational Safety, Institute of Occupational Safety and Health, Council of Labor Affairs, Executive Yuan, Shijr City, Taipei 221, Taiwan
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  • Hong-Chun Wu,

    1. Division of Occupational Safety, Institute of Occupational Safety and Health, Council of Labor Affairs, Executive Yuan, Shijr City, Taipei 221, Taiwan
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  • Charng-Cheng Tsaur,

    1. Division of Occupational Safety, Institute of Occupational Safety and Health, Council of Labor Affairs, Executive Yuan, Shijr City, Taipei 221, Taiwan
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  • Chun-Cheng Shen,

    1. Department of Safety, Health and Environmental Engineering, and EPA/NKFUST Southern Center for Emergency Response of Toxic Substance (ENSERTS), National Kaohsiung First University of Science & Technology, Yenchau, Kaohsiung 824, Taiwan
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  • Hsiao-Yun Tsai,

    1. Department of Safety, Health and Environmental Engineering, and EPA/NKFUST Southern Center for Emergency Response of Toxic Substance (ENSERTS), National Kaohsiung First University of Science & Technology, Yenchau, Kaohsiung 824, Taiwan
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  • Jenq-Renn Chen

    Corresponding author
    1. Department of Safety, Health and Environmental Engineering, and EPA/NKFUST Southern Center for Emergency Response of Toxic Substance (ENSERTS), National Kaohsiung First University of Science & Technology, Yenchau, Kaohsiung 824, Taiwan
    • Department of Safety, Health and Environmental Engineering, and EPA/NKFUST Southern Center for Emergency Response of Toxic Substance (ENSERTS), National Kaohsiung First University of Science & Technology, Yenchau, Kaohsiung 824, Taiwan
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  • This article is written solely for the purpose of promoting good safety practices and better safety research in the semiconductor industries. This article and the authors are not responsible or intent to incur any legal or insurance liability for the cases discussed.

Abstract

A second possible cause of a previously described silane explosion is proposed based on a more detailed examination of the physical evidence. The explosion and fire occurred in a silane gas room in a photovoltaic fabrication plant. This investigation recommends more research to investigate the characteristics of a silane release and the resulting fires and explosions. Suggestions are also made for a better silane cylinder valve design and cabinet design. Silane leaks are difficult to detect; therefore the recommendations include the need for a silane gas detector to warn the operator when there are leaks. © 2007 American Institute of Chemical Engineers Process Saf Prog, 2007.

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