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Abstract

The characteristics of fire and explosion in semiconductor fabrication processes differ from those in the chemical process industries. Case studies are given to illustrate the common, as well as peculiar features of fire and explosion in the fabrication processes. In particular, the process exhaust systems, usually involving flammable, pyrophoric and corrosive gases and vapors, were shown to be a major fire and explosion source. With some preliminary understanding of the semiconductor process, standard chemical process safety knowledge can be readily applied to semiconductor processes.