Immersion scatterometry for improved nano-scale topography measurements
Article first published online: 20 MAR 2008
Copyright © 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
physica status solidi (a)
Volume 205, Issue 4, pages 784–788, April 2008
How to Cite
Liu, E. and Terry, F. L. (2008), Immersion scatterometry for improved nano-scale topography measurements. Phys. Status Solidi A, 205: 784–788. doi: 10.1002/pssa.200777756
- Issue published online: 4 APR 2008
- Article first published online: 20 MAR 2008
- Manuscript Accepted: 19 JAN 2008
- Manuscript Revised: 5 JAN 2008
- Manuscript Received: 10 JUN 2007
- KLA-Tencor Corporation
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