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Keywords:

  • 78.20.Bh;
  • 78.20.Ci;
  • 78.66.Db

Abstract

We discuss optimized extraction of information contained in a series of complex reflectance ratios in a series of consecutive, in-situ SE measurements during the growth of thin films. We present a general computational scheme and discuss guidelines for the optimum data treatment. As an example, we analyze several hundreds of spectra recorded during the growth of diamond-like carbon on TiCN/steel substrate. (© 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)