In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures



We discuss optimized extraction of information contained in a series of complex reflectance ratios in a series of consecutive, in-situ SE measurements during the growth of thin films. We present a general computational scheme and discuss guidelines for the optimum data treatment. As an example, we analyze several hundreds of spectra recorded during the growth of diamond-like carbon on TiCN/steel substrate. (© 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)