Original Paper

In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures

  1. J. Humlíček*

Article first published online: 20 MAR 2008

DOI: 10.1002/pssa.200777798

Issue

physica status solidi (a)

physica status solidi (a)

Volume 205, Issue 4, pages 793–796, April 2008

Additional Information

How to Cite

Humlíček, J. (2008), In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures. Phys. Status Solidi A, 205: 793–796. doi: 10.1002/pssa.200777798

Author Information

  1. Department of Condensed Matter Physics, Faculty of Science, Masaryk University, Kotlářská 2, 61137 Brno, Czech Republic

*Phone: +420 54949 4505, Fax: +420 54121 1214

Publication History

  1. Issue published online: 4 APR 2008
  2. Article first published online: 20 MAR 2008
  3. Manuscript Accepted: 21 NOV 2007
  4. Manuscript Revised: 26 OCT 2007
  5. Manuscript Received: 8 JUN 2007

Funded by

  • Ministry of Education of Czech Republic. Grant Number: MSM0021622410

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Keywords:

  • 78.20.Bh;
  • 78.20.Ci;
  • 78.66.Db

Abstract

We discuss optimized extraction of information contained in a series of complex reflectance ratios in a series of consecutive, in-situ SE measurements during the growth of thin films. We present a general computational scheme and discuss guidelines for the optimum data treatment. As an example, we analyze several hundreds of spectra recorded during the growth of diamond-like carbon on TiCN/steel substrate. (© 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

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