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Keywords:

  • 42.68.Mj;
  • 52.25.Os;
  • 61.46.Df;
  • 78.67.Bf;
  • 87.64.Cc

Abstract

We have utilised in situ Rayleigh–Mie scattering ellipsometry to analyse the growth process of amorphous hydrogenated carbon nitride (a-C:H:N) nanoparticles synthesised in a plasma of nitrogen and acetylene. The validity of the measurements is shortly discussed. The complex refractive indices in dependence of the particle radius are carefully determined and compared with a-C:H(:N) films which are deposited under similar conditions and analysed via multiple wavelength ellipsometry. Internal structures of the nanoparticles are then deduced from the change of optical constants during the growth. (© 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)