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Keywords:

  • 78.20.Bh;
  • 78.20.Ci;
  • 78.66.Db;
  • 78.67.Bf

Abstract

Spectroscopic ellipsometry (SE) is applied to characterize Si columnar nanostructures. By employing effective medium approximation (EMA) theory, Si nanorods are treated as a graded layer with each sub-layer modeled as a mixture of Si and voids with varying porosity fraction. In addition, the rigorous coupled-wave analysis and finite-element Green's function method were used in modeling Si nanorods as a stack of disks with varying diameters and thicknesses, and the calculations are in satisfactory agreement with the measurement results. (© 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)