Error analysis of a simple and accurate optical coherent ellipsometer

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Abstract

The polarization modulation of optical coherent ellipsometry (OCE) is provided by the coupling between two highly correlated orthogonal polarizations with slightly different frequencies. Error of the sample-analyzer (SA) OCE is analyzed using the Stokes–Mueller formalism to include samples with roughness. Sample's depolarization will degrade the coherency of the incident two-frequency laser beam, and the degradation is more serious for smaller sin 2ψ. For the simplest SA OCE with the analyzer angle at 45° from both polarizations, the misalignment of the analyzer affects only the measured dc signal but not the beat signal; and the extinction of the analyzer affects only the beat signal but not the dc signal. This SA OCE is used to measure the polarization properties for a few samples to demonstrate its applicability. (© 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

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