Generation of droplet-free high-power pulsed sputtering (HPPS) glow plasma with several tens of kilowatts
Article first published online: 20 MAR 2008
Copyright © 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
physica status solidi (a)
Volume 205, Issue 4, pages 949–952, April 2008
How to Cite
Yukimura, K., Mieda, R., Tamagaki, H. and Okimoto, T. (2008), Generation of droplet-free high-power pulsed sputtering (HPPS) glow plasma with several tens of kilowatts. Phys. Status Solidi A, 205: 949–952. doi: 10.1002/pssa.200778304
- Issue published online: 4 APR 2008
- Article first published online: 20 MAR 2008
- Manuscript Accepted: 14 NOV 2007
- Manuscript Revised: 13 NOV 2007
- Manuscript Received: 24 AUG 2007
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